NPG-110930-GV2.2 Power Mainboard
- Warranty： 365 days
- Quality: Original module
- Condition： New / Used
- Warehouse: Spot
- Delivery time: Shipped in 3 days after payment
- Mailbox：plcvarious@foxmail.com
Introduction
1.Functions
- Power Output Closed-loop Control: Executes NP Control V2.2 firmware to regulate output voltage, current and power of the main power stage; realizes constant power / constant voltage / constant current mode switching.www.plcva.com
- Signal Sampling & Feedback: Collects real-time voltage, current and temperature signals from power output circuit, feeds back to CPU to adjust power driving signal dynamically.
- Fault Detection & Protection: Monitors overvoltage, overcurrent, over-temperature, short-circuit and arc faults; triggers fast power cut-off and alarm signal output to protect power module and process chamber components.
- Communication & Command Parsing: Receives recipe commands from upper equipment controller; uploads power status, waveform data and fault logs via industrial communication interface.
- Drive Signal Generation: Generates PWM drive signals to control power switching devices, to stabilize plasma power delivery.
- Parameter Storage & Calibration: Stores calibration coefficients, preset process parameters and fault history on onboard memory for maintenance and recipe recall.plcva.com
NPG-110930-GV2.2 Power Mainboard
2. Applications & Usage
- Primary Industry: Semiconductor manufacturing, plasma processing, vacuum thin-film deposition and etching equipment.plcva.com
- Core Usage: Serves as the brain of NP series power supply. It controls and monitors the power output that generates and maintains plasma inside the process chamber.
- Working Scenario: Installed inside RF / DC plasma power supply cabinet in cleanroom. It works with power switching modules to deliver controllable power for wafer processing.
- Application Value: Guarantees stable plasma energy during wafer etch or deposition process; provides fast fault interlock to avoid chamber damage and wafer rejects; supports precise power tuning for high repeatability of semiconductor recipes.
NPG-110930-GV2.2 Power Mainboard
NPG-110930-GV2.2 Power Mainboard
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