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Main Functions

1. Mechanical mounting fixture for quartz viewport window on vacuum process chamber. Provides precise oriented positioning and bolted clamping for quartz window to guarantee vacuum sealing performance with matching O‑ring gasket.
2. Integrates built‑in metal screen and filter mesh. Blocks plasma‑generated particle debris, sputtered by‑products and chamber polymer residues, preventing contamination and particle deposition onto quartz window surface.More products: www.plcva.com
3. Maintains high‑vacuum boundary integrity for process chamber. Resists thermal cycling, plasma radiation and corrosive process gas inside etch chamber. Preserves optical transmission path for chamber end‑point detection and plasma observation.
4. Features orientation‑keyed mechanical structure, ensures correct angular installation position of quartz window during maintenance replacement, avoids assembly offset and vacuum leakage risk.
5. Modular assembled construction, enables quick disassembly for cleaning, screen replacement or quartz window servicing without full chamber teardown.

LAM Research 839‑802923‑006 Oriented Holder Assembly

Applications & Usage

1. Original OEM chamber viewport holder spare part exclusively for LAM Research 2300 Metal semiconductor etch tool, installed on process vacuum chamber wall as observation window interface component。
2. Supports optical endpoint detection system: plasma light passes through quartz window for real‑time etch‑endpoint monitoring during wafer plasma etching production.
3. Protects quartz window from heavy particle bombardment; extends service life of viewport window, reduces particle‑related wafer defect risk in fab manufacturing.
4. Used as replacement spare part for semiconductor fab equipment maintenance. When original holder/screen assembly gets clogged or damaged, this unit restores chamber vacuum integrity and optical observation function, minimizing tool downtime.