AMAT

AMAT SPX Mainboard MUXADIO110, P/N:0190-35763, Assy No.30299-148

Warranty： 365 days
Quality: Original module
Condition： New / Used
Warehouse: Spot
Delivery time: Shipped in 3 days after payment
Mailbox：plcvarious@foxmail.com

+086 18205988494

Introduction

1.Functions

Multiplexed Analog & Digital Signal Acquisition & Output It collects multi-channel analog signals (pressure, temperature, gas flow, ESC voltage, vacuum gauge readings) and digital discrete signals (limit switches, valve status, chamber door interlock). It outputs digital trigger and analog setpoint signals to control solenoid valves, actuators and auxiliary chamber components.
Seriplex SPX Field Bus Communication Implements AMAT proprietary Seriplex SPX sensor bus protocol. It acts as a remote I/O node, transmitting sensor feedback and receiving commands between chamber local peripherals and the main system controller over a single bus cable, greatly reducing field wiring quantity.www.plcva.com
Signal Isolation & Noise Suppression Onboard opto-isolation circuits separate field side signals from control logic circuits. It resists heavy electromagnetic interference generated by RF plasma power supplies in the cleanroom vacuum chamber, preventing false signal sampling and mis-triggering.
Interlock Signal Routing & Status Reporting Routes safety interlock and EMO related digital signals, monitors interlock loop states, and uploads fault or trip events to the host controller. It can lock output signals when safety conditions are violated.www.plcva.com
Onboard Diagnostics & LED Status Indication Built-in power-on self-test. LED indicators display bus communication status, individual I/O channel activity and fault conditions for fast on-site troubleshooting. It logs signal abnormality events for equipment recipe and maintenance traceability.

AMAT SPX Mainboard MUXADIO110

AMAT SPX Mainboard MUXADIO110

2. Applications / Purposes

This Seriplex SPX MUXADIO110 I/O motherboard is a core chamber interface spare part for AMAT semiconductor wafer processing platforms:

PVD Physical Vapor Deposition Chambers Collects sensor signals and controls valves for metal / dielectric sputtering thin-film deposition.
PECVD Plasma Enhanced Chemical Vapor Deposition Used for silicon nitride, amorphous silicon and oxide film deposition, monitoring chamber pressure, temperature and gas delivery system.
Etch Process Chambers For wafer plasma etch tools, serving as the peripheral signal gateway for vacuum, gas and actuator control.
Semiconductor Fab Equipment Maintenance Spare Applied for replacement, repair and refurbishment of AMAT Producer, Centura and Endura process chambers. Without this MUXADIO110 board, the chamber cannot communicate with peripheral sensors and actuators, and the wafer process recipe cannot run normally.