DAIHEN RG-728A 01A RF Signal Sampling Sensor PCB Assembly
- Warranty： 365 days
- Quality: Original module
- Condition： New / Used
- Warehouse: Spot
- Delivery time: Shipped in 3 days after payment
- Mailbox：plcvarious@foxmail.com
Introduction
1.Functions
- RF power & waveform sampling It samples high-frequency RF voltage, current, forward power and reflected power signals from the transmission line between RF generator and plasma chamber. It converts high-voltage high-frequency RF signals into low-amplitude analog signals for backend control board processing.
- Phase angle detection Captures phase difference between RF voltage and current. The phase data is the critical input for the matching network main control board (such as RMN series) to calculate real-time load impedance of plasma.www.plcva.com
- High-frequency signal filtering and isolation Integrated RF filter and isolation circuits suppress high-frequency noise and transient surge. It isolates low-voltage control circuits from high-power RF loop to avoid damage and signal distortion.
- Signal conditioning & analog output Amplifies and conditions sampled raw signals, outputs standardized analog measurement signals to RMN series matching controller boards for closed-loop impedance tuning calculation.
- Over-power and arc sensing auxiliary detection Detects sudden RF spike and arc discharge events inside the chamber. It sends abnormality trigger signals to the main control board to activate interlock protection.
DAIHEN RG-728A 01A
2. Applications
This sensor PCB is an indispensable front-end sensing component installed inside DAIHEN RF automatic matching networks, compatible with AMAT AKT PECVD systems you previously reviewed.
- Flat Panel Display manufacturing: PECVD thin-film deposition for LCD / OLED panel production.
- Thin-film photovoltaic production: Silicon passivation layer and anti-reflection coating deposition.
- Semiconductor wafer fabrication: Plasma etching, ashing and dielectric deposition processes.
- Spare replacement part: Direct replacement for faulty RG-728A 01A sensor boards, restoring RF power sampling and matching function, minimizing fab equipment downtime.www.plcva.com
- Preventive maintenance and spare inventory stocking for cleanroom plasma process tools.
DAIHEN RG-728A 01A
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