Lam Research 853‑810609‑050 OEM Cable Assembly

  • Warranty: 365 days
  • Quality: Original module
  • Condition: New / Used
  • Warehouse: Spot
  • Delivery time: Shipped in 3 days after payment
  • Mailbox:plcvarious@foxmail.com

Introduction

Main Functions

  1. Vacuum pump power transmission: Deliver main operating power from RPDB (Remote Power Distribution Box) to process vacuum pump unit, ensure stable power supply for pump motor normal operation.
  2. EMO emergency‑off safety signal routing: Transmit hardware‑level EMO emergency‑stop interlock signals between RPDB and vacuum pump subsystem. Trigger immediate pump shutdown once emergency‑off signal is activated for personnel and equipment protection.
  3. Multi‑conductor integrated harness: Combine power‑carrying wires and safety interlock signal lines inside one single cable assembly, provide one‑plug‑in connection to simplify on‑site wiring inside semiconductor tool cabinet.More products: www.plcva.com
  4. Shielded anti‑interference performance: Equipped with overall cable shielding structure, suppress electromagnetic noise generated by vacuum‑pump motor operation; prevent interlock‑signal mis‑triggering caused by motor‑driven EMI.
  5. Mechanical‑environmental reliability: Fab‑grade cable jacket resists abrasion, vibration, temperature fluctuation and minor chemical‑solvent exposure inside equipment cabinet; maintain stable electrical performance under long‑term continuous fab‑running conditions.
  6. Pre‑terminated OEM assembly: Both ends are factory crimped with original‑spec connectors, guarantee pin‑assignment consistency; avoid wiring errors during field replacement.

Lam Research 853‑810609‑050 OEM Cable Assembly

Typical Applications

  1. Lam Research plasma etch semiconductor equipment: Main interconnection harness between RPDB remote power distribution box and process vacuum pump for Lam dielectric / conductor etch platforms.
  2. Vacuum subsystem power & safety interlock loop: Supply power for process vacuum pump and realize emergency‑stop hardwired interlock control of vacuum pump unit.
  3. Semiconductor wafer fab production environment: Deployed in 300 mm wafer fabrication facilities for mass‑production of logic chips and memory devices.
  4. OEM spare‑part replacement: Used as original spare cable assembly for on‑site maintenance, troubleshooting and failure‑cable replacement on running Lam process tools.
  5. Semiconductor‑equipment relocation & refurbishment projects: Applied for equipment relocation, cabinet re‑wiring and second‑hand Lam etch‑tool restoration, recover vacuum‑pump power and EMO interlock‑loop integrity.

Lam Research 853‑810609‑050 OEM Cable Assembly

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