OTHER BRANDS

1. Functions

Real-time process computation & sequence control The onboard CPU executes embedded firmware to run recipe scripts, manages the full deposition process sequence, controls timing of gas flow, RF plasma power, chamber temperature and vacuum pumping cycles. It coordinates all sub-modules inside the AKT PECVD chamber.www.plcva.com
Multi-channel signal acquisition & closed-loop feedback It reads analog/digital sensor signals from pressure gauges, temperature sensors, flow meters and interlock switches. It calculates real-time deviations and outputs control commands to maintain stable thin-film deposition parameters.
Equipment interlock & safety protection Hardware and software interlock logic is integrated. It triggers safety interlock actions to cut off RF power, gas supply or halt chamber movement when abnormal conditions occur, to prevent chamber damage and personal hazards.
System communication & data logging Supports internal backplane bus and external host communication. It uploads process status, alarm messages and runtime data to the main equipment HMI; stores recipe logs, fault history and production data locally.
Peripheral I/O management Drives digital outputs for valves and relays; receives digital inputs from limit sensors and status switches, acting as the interface bridge between the main controller and field actuators/sensors.

AKT P/N 0100-W389FCPU Board Assembly

This is an OEM dedicated spare control board exclusively for Applied Materials AKT large-area PECVD deposition tools.

Flat-panel display manufacturing: PECVD silicon-based thin film deposition for LCD / OLED panel substrate.
Thin-film solar PV production: Deposition of passivation and anti-reflection layers on solar modules.
Chamber local master controller inside AKT PECVD production cluster tools.
Equipment maintenance replacement spare part: Used to replace failed CPU boards for production line uptime recovery.www.plcva.com