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1.Functions

1. Closed-loop RF impedance tuning algorithm execution The board samples RF forward power, reflected power, voltage and phase signals from the plasma load. It calculates impedance deviation in real time and outputs drive commands to adjust motorized variable capacitors inside the matching unit, automatically tuning to approach 50Ω impedance and minimize reflected RF power.
2. Signal sampling and actuator drive coordination It processes high-frequency sensing signals, generates control pulses for stepper motors of tuning capacitors, and feeds back capacitor position data to complete continuous dynamic matching during plasma recipe running.www.plcva.com.
3. System communication and status data upload It communicates with RF power generator and chamber host controller via dedicated interface bus. It transmits matching status, reflection value, tuning position and fault codes to equipment HMI for process monitoring and data logging.
4. Hardware interlock and fault protection Built-in monitoring circuits detect over-reflection, over-temperature, motor stall and communication failure. It triggers interlock signals to shut down RF output to protect RF source, matching network and vacuum chamber hardware.
5. Recipe parameter storage It stores preset matching parameters for different process recipes, supporting fast preset tuning at recipe startup to shorten plasma ignition stabilization time.

DAIHEN RMN-162 RF

DAIHEN RMN-162 RF

2. Applications

This PCB is the core control board for DAIHEN RF automatic matching networks, widely fitted on plasma process tools, especially AMAT AKT PECVD systems for FPD and solar thin-film production.

1. Flat Panel Display industry: PECVD thin-film deposition for LCD and OLED panels.
2. Thin-film photovoltaic manufacturing: Silicon passivation and anti-reflection layer deposition.
3. Semiconductor wafer fab: Plasma etching, ashing and dielectric deposition processes.
4. Equipment maintenance spare part: Direct replacement for faulty RMN-162 boards to restore RF matching function and reduce production downtime.www.plcva.com
5. Preventive overhaul and spare inventory stocking for cleanroom production lines.

DAIHEN RMN-162 RF

DAIHEN RMN-162 RF

DAIHEN RMN-162 RF

Understand the lowest price, please contact via email: plcvarious@foxmail.com

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