OTHER BRANDS

1.Functions

Central Process Control: Embedded CPU executes process control logic, runs firmware to manage gas mass flow, vacuum pressure, valve sequence and sensor closed-loop regulation.
Multi-signal Interface Management: Integrates digital I/O, analog input/output, serial / fieldbus communication interfaces to collect real-time signals from pressure gauges, MFCs, temperature sensors and solenoid valves.www.plcva.com
Data Acquisition & Telemetry: Continuously samples process parameters, stores log data, transmits real-time status and alarms to the equipment host controller.
Interlock & Safety Protection: Built-in hardware interlock circuits to trigger safety shutdown when abnormal pressure, flow or fault signals are detected, to protect wafer process hardware.
System Communication Bridge: Acts as a communication gateway between field process components and upper machine controller, supporting command parsing, status feedback and remote calibration.
Daughterboard Expansion (000-9007-301): The 000-9007-301 is a matched auxiliary daughter board, expanding additional analog channels, isolated signal conditioning and signal isolation circuits for the mainboard 1017939-01.www.plcva.com

Part No.: 1017939-01 00A 131227005CH ; 000-9007-301 00E 131214007CH

Part No.: 1017939-01 00A 131227005CH ; 000-9007-301 00E 131214007CH

Primary Industry: Semiconductor wafer manufacturing equipment (etching, PVD/CVD thin-film deposition, plasma processing, vacuum gas panel subsystems).
Core Usage: Installed inside the process tool control cabinet as the core control unit of MKS gas & vacuum subsystem. It governs mass flow controllers, Baratron pressure transducers, vacuum gauges and pneumatic valves.www.plcva.com
Working Scenario: Operates in cleanroom industrial environment, controls gas delivery recipe execution, stabilizes chamber pressure and gas flow during wafer processing.
Application Value: Ensures high repeatability of semiconductor thin-film and etching recipes; isolates noisy field signals to reduce measurement drift; provides real-time fault alarm and safety interlock to prevent wafer scrap and equipment damage.