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1.Functions

1. Real-time RF impedance matching control The RMN-38-07G main board receives reflected power and phase signals sampled from the plasma chamber. It executes matching algorithm and sends adjustment commands to tune variable capacitors inside the matching box, to minimize reflected RF power and maintain 50Ω impedance matching between RF generator and plasma load.
2. High-speed sensing & actuator driving RMN-291-04A acts as the front-end interface: it samples RF voltage, current, phase and reflected power signals, amplifies sensor signals, and drives the motor/stepper actuators of the variable tuning capacitors according to commands from RMN-38-07G.
3. Closed-loop plasma load stabilization Continuously tracks dynamic impedance changes of plasma during deposition/etch recipes. Fast auto-tuning compensates impedance drift caused by gas pressure, power variation and wafer state, ensuring stable plasma discharge.www.plcva.com
4. Fault monitoring & interlock protection Detects excessive reflected power, over-temperature, actuator fault and communication failure. It triggers hardware interlock to cut off RF generator output to protect RF source, matching network and process chamber. It sends alarm codes and status signals to equipment host / HMI.
5. System communication & recipe coordination Communicates with RF power generator and chamber main controller via digital bus. It uploads matching status, reflected power data and tuning position feedback for recipe logging and process traceability.

DAIHEN RMN-38-07G + RMN-291-04A

2. Applications

This matched PCB set is the internal control core of DAIHEN RF auto-matcher units, widely installed on PECVD, PVD, plasma etch tools (including Applied Materials AKT FPD & thin-film solar deposition equipment which we discussed previously).www.plcva.com

1. Flat Panel Display manufacturing: Plasma CVD thin film deposition for LCD / OLED panels.
2. Thin-film photovoltaic production: Silicon passivation layer PECVD processes.
3. Semiconductor wafer fabrication: Plasma etching, ash, thin-film deposition processes.
4. OEM spare parts: Replacement boards for maintenance and downtime recovery of production plasma tools.
5. Used for preventive overhaul and spare inventory stocking in FPD fab, solar fab and semiconductor cleanroom.

DAIHEN RMN-38-07G + RMN-291-04A

Understand the lowest price, please contact via email: plcvarious@foxmail.com

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