OTHER BRANDS

1.Functions

Closed-loop Plasma Power Regulation: The main board 230-1478-B executes firmware to implement closed-loop control of RF or DC output power, voltage and current; supports constant power, constant voltage and constant current operating modes for plasma processing.www.plcva.com
High-speed Signal Sampling & Feedback: Collects real-time waveform, voltage, current and reflected power signals from power output circuit. The 230-3070 daughter board provides signal conditioning, isolation and analog front-end processing for high-precision sampling.
Fault Detection & Fast Safety Interlock: Continuously monitors overvoltage, overcurrent, over-temperature, short-circuit, arc and reflected power faults. It instantly cuts off power output and triggers alarm signals to protect the power generator and process chamber hardware.
Industrial Communication & Command Handling: Receives process recipe commands from the semiconductor equipment host controller; transmits real-time power status, waveform data and fault codes via industrial bus.www.plcva.com
PWM Drive Signal Generation: Generates high-frequency drive pulses to control power switching components, stabilizing plasma energy delivery into the vacuum chamber.
Calibration & Parameter Storage: Stores factory calibration coefficients, preset process recipes and fault logs in non-volatile memory for equipment maintenance, troubleshooting and recipe recall.

AE 230-1478-B + 230-3070 Power Supply Control PCB Assembly

AE 230-1478-B + 230-3070 Power Supply Control PCB Assembly

Primary Industry: Semiconductor wafer fabrication.
Core Usage: Installed inside Advanced Energy RF/DC plasma power supply cabinets. This PCB assembly serves as the central control brain of the plasma generator to precisely regulate plasma power for wafer processing.
Working Scenario: Deployed in cleanroom environment of etch, PVD and CVD thin-film deposition tools. It controls plasma ignition and maintains stable plasma during wafer etching and film deposition.www.plcva.com
Application Value: Delivers highly repeatable plasma energy to guarantee wafer process consistency; provides rapid arc suppression and fault interlock to reduce wafer scrap and equipment damage; supports remote monitoring and diagnostic functions to minimize tool downtime. It is a critical original spare part for AE plasma power supply repair and maintenance.