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KLA-Tencor 54-0446 XYZ / FZ Interface Control Board

Warranty： 365 days
Quality: Original module
Condition： New / Used
Warehouse: Spot
Delivery time: Shipped in 3 days after payment
Mailbox：plcvarious@foxmail.com

+086 18205988494

Introduction

1.Functions

3-axis (XYZ) motion signal interface Serves as the signal bridge between the main system controller and the XYZ precision wafer stage. It transmits motion commands and feedback signals for X, Y, Z linear axes.www.plcva.com
Focus Z axis encoder signal acquisition Receives encoder position feedback from the Z focus stage, converts encoder differential signals into digital position data, feeds real-time Z-axis height / focus position back to the main CPU for auto-focus calculation.
Motion enable & limit signal handling Process axis enable signals, emergency stop, positive/negative travel limit sensors and home reference signals of the precision stage; implements hardware interlock to prevent stage overtravel collision.
Signal conversion and isolation Converts system-level logic signals to driver-side signals for stage motors. Provides electrical isolation and noise filtering to suppress interference in high-precision optical measurement environment.
Onboard diagnostic & status feedback Detects signal disconnection, encoder faults, limit trigger and communication abnormalities; reports stage interface status to the host machine for equipment fault diagnosis and maintenance.www.plcva.com

KLA-Tencor 54-0446

KLA-Tencor 54-0446

2. Applications

This PCB is an original spare part for KLA-Tencor wafer surface profiler / metrology tools .

Core Application: Semiconductor wafer precision measurement equipment, responsible for 3-axis wafer scanning stage and vertical focus Z-axis signal interface.

Industries: Semiconductor fabs, compound semiconductor, display panel, optical component and MEMS manufacturing labs.plcva.com

Core Purpose: To realize closed-loop position control of the XYZ scanning stage and auto-focus Z axis. It ensures ultra-precise positioning during wafer surface scanning, step height, roughness and thin-film profile measurement. It guarantees stable encoder feedback and motion safety interlock. Widely used as replacement spare part for breakdown maintenance of KLA-Tencor surface metrology tools.